|
|
Press Information
Visit DuPont Performance Elastomers Kalrez® Perfluoroelastomers Parts for Semiconductor Manufacturing
DuPont Performance Elastomers Kalrez® perfluoroelastomer parts are a family of high performance seals widely used in aggressive chemical or high temperature environments, including the semiconductor, chemical processing industry (CPI), oil, gas, and aerospace industries. Kalrez® perfluoroelastomer parts help improve productivity by reducing particle generation, offering extended seal life, increase equipment reliability and increase mean time between repair (MTBR). This translates to improved wafer yields and reduced cost of ownership. Kalrez® parts combine the sealing force and resilience of an elastomer with the chemical inertness and thermal stability of Teflon® fluorocarbon resin. Kalrez® contains no active hydrogen atoms in its polymer backbone, making it essentially unaffected by over 1600 chemicalsat temperatures up to 327 °C. Kalrez® Ultrapure™ sealing parts DuPont Performance Elastomers offers a range of compounds for Kalrez® parts that enhance sealing performance in highly aggressive environments, from wet to dry, like plasma and gas deposition, etching, ashing, PECVD, HDPCVD, PVD, Metal CVD, NF 3 and oxygen plasma, and wet process chemicals. The range includes Kalrez® Sahara™ 8085 For low weight loss and low particle generation in oxygen and fluorine containing plasma processes such as HDCVD, PECVD and SACVD as well as etching and ashing processes. Kalrez® 7075UP For thermal processes that require temperature resistance up to 327°C and very low compression set. Kalrez Sahara™ 8475 For thermal processes such as RTP and lamp anneal Kalrez® 8002 For lower contamination and reduced particle generation in select plasma and gas deposition processes. Kalrez® 6375UP For wet semiconductor sealing — resists all wet process chemicals, amine-base strippers, acids and bases. Kalrez® Bonded Door Seals Kalrez® bonded door seals, designed for HDPCVD, PECVD, SACVD and metal CVD as well as etch and ashing wafer processing, not only outperform conventional O-rings in slit and gate valve door seal applications, but offer extended seal life because of reduced rolling and twisting during door actuation as well as less chance of incorrect installation.. Availability of Kalrez ® perfluoroelastomer parts Kalrez® parts are manufactured by DuPont Performance Elastomers in Newark, Delaware, USA, and Japan at ISO 9000 registered facilities. Products are available through authorized distributors as standard, metric, JIS and custom O-rings and as custom designed parts, such as V-rings, diaphragms, valve seats, t-seals, flange gaskets and sleeve dampeners and bonded door seals. Finished parts are specially cleaned and double-wrap packaged in a Class 100 Clean Room. For more information about Kalrez ® perfluoroelastomer parts , please call: ++41 22 717 4000, or fax: ++41 22 717 4001. Or, contact the web-site: www.kalrez.com About DuPont Performance Elastomers # # #
Note to Editors: DuPont and Teflon® are registered trademarks of DuPont and its affiliates. Contact:
Press Contact: 05 ELAS 06 |